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the materials used in the construction of the internal feeders may contaminate the polycrystalline silicon
SEMI E190 — Specification for Equipment Data Publication (EDP)
SEMI E134-0624 (technical revision)
in which case the word "mask" can be substituted for "wafer
本目的の達成のため備える必要のある，主たる要素が6つある:
D08000 - SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time Revision:SEMI D80-0421 - Current the materials used in theHigh gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation for determining the water vapor transmission rate of plastic film using a quadrupole mass spectrometer as detector. Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays. Referenced SEMI Standards (purchase separately)
US$ 15000.00
US$ 120.95
US$ 3000.00